ESE 5360 (Nanofabrication and Nanocharacterization)
Hands-on Laboratory Course in the Cleanroom
Since ESE 5360 (Nanofabrication and Nanocharacterization) was first offered in Spring 2017, this course has been one of the most popular courses in Penn Engineering. This course is intended for first-year graduate students interested in the experimental practice of nanotechnology and semiconductor. With a hands-on laboratory experience, students gain familiarity with both top-down and bottom-up fabrication and characterization technologies. This is achieved through the realization of a variety of micro- and nanoscale structures and devices that can exhibit either classical or quantum effects at the small scale.
How We Run This Course
Each student will be given a wafer or chip. They will enter a state-of-the-art cleanroom, utilizing tools identical to those employed by researchers and engineers. Students will fabricate their devices and subsequently analyze the characteristics of their creations.
What You Learn
1. MEMS Lab
Tob-down Process
Classical Physics
Key Techniques
UV Lithography with Alignment Process
Physical Vapor Deposition
Reactive Ion Etch, Deep Reactive Ion Etch, Wet Etch
Dicing, Wire bonding
Profilometry, Optical Microscopy, White Light Interferometry
Scanning Electron Microscopy
Actuation of Comb Drives and Cantilevers
2. Directed Self-assembly Lab
Bottom up Process
Classical Physics
Key Techniques
Electron Beam Lithography
Reactive Ion Etch
Chemical Process with Block Co-polymer
Reflectometry, Ellipsometry
Scanning Electron Microscopy, Atomic Force Microscopy
Sample Preparation for High Resolution Imaging
3. Graphene Transistor and pH Sensor Lab
Top-down Process
Quantum Physics
Key Techniques
Heidelberg Laser Direct Writing with Alignment Process
Soft Lithography, Microfluidics
Physical Vapor Deposition
Reactive Ion Etch
Graphene Transfer
Lift-off Process, High-temperature Process (Diffusion)
Probe Station, Optical Microscopy
4. Quantum Dot Lab
Bottom up Process
Quantum Physics
Key Techniques
CdSe Quantum Dot Synthesis
UV-Vis Spectroscopy
Fluorescence Spectroscopy
Sample Preparation for Transmission Electron Microscopy
Scanning Transmission Electron Microscopy