Nano IoT Track

The Nano IoT track curriculum is crafted to develop a theoretical understanding of Nano IoT while providing practical experience in cleanroom and nanocharacterization facilities. The course lineup encompasses microelectromechanical systems (MEMS), nanorobotics, IoT sensors and systems, bioengineering, nanomedicine, and integrated product design. Students actively participate in hands-on laboratory sessions.

In particular, the ESE 5360 course empowers students to independently create and analyze devices, incorporating both front-end processes like lithography, etching, and deposition, and back-end procedures such as dicing and wire bonding. The course delves into various characterization techniques, including the application of electron microscopes, atomic force microscopes, and diverse metrology tools. Among the lab modules offered, MEMS fabrication and characterization involve UV lithography, deep reactive ion etch, physical vapor deposition, dicing, wire-bonding, electrical characterization, and electron microscopy. Another lab module focuses on pH sensor development, incorporating microfluidics, UV lithography, and soft lithography. (Link)

Category A: Required Courses (3 CUs)

ENGR 5040 – Fundamental Concepts in Nanotechnology
ESE/MSE 5250 – Nanoscale Science and Engineering
Either ESE 5360 – Nanofabrication and Nanocharacterization (Link);
or MSE 5650 – Fabrication and Characterization of Nanostructured Devices

Category B: Select 4 from the following (4 CUs)

ESE 5210 The Physics of Solid State Energy Devices
ESE 5290 Introduction to Micro- and Nano-electromechanical Technologies
ESE 6250 Nanorobotics
ESE 6730 Integrated Photonic Systems
MEAM 5750 Micro and Nano Fluidics
CBE 5450 Electrochemical Energy Conversion and Storage
BE 5550 Nanoscale Systems Biology

Category C: Select 3 from the following (3 CUs)

ESE 5150 Internet of Things Sensors and Systems
ESE 5160 IoT Edge Computing
ESE 5430 Human Systems Engineering
ESE 5720 Analog Integrated Circuits
MEAM 5490 Order-of-magnitude estimation for terrestrial and space engineering
MEAM 5140 Design for Manufacturability
MEAM 5200 Introduction to Robotics
CBE 5540 Engineering Biotechnology
CBE 5430 Sustainable Development of Water Resource Systems
CBE 5640 Drug Delivery Systems: Targeted Therapeutics and Translational Nanomedicine
BE 5510 Biomicrofluidics
BE 5470 Fundamental Techniques of Imaging
BE 5850 Materials for Bioelectronics
IPD 5150 Integrated Product Design
IPD 5270 Industrial Design I
EAS 5450 Engineering Entrepreneurship I
EAS 5460 Engineering Entrepreneurship II