Singh Center for Nanotechnology

Home of the Nanotechnology Master's Program

The establishment of the Singh Center for Nanotechnology in 2013 has been the base for the Nanotechnology Master's Program. Learn the following three facilities at the Singh Center for Nanotechnology:
1) Quattrone Nanofabrication Facility,
2) Nanoscale Characterization Facility, and
3) Scanning and Local Probe Facility.

Quattrone Nanofabrication Facility (QNF)

The Quattrone Nanofabrication Facility (QNF) is a cleanroom with a class 100/1000, located on the ground floor of the Singh Center. It houses over 80 fabrication and metrology tools specifically designed for lithography, etching, deposition, and packaging, organized across six bays. The soft lithography facility is fully equipped with all necessary tools for manufacturing microfluidic devices. The QNF features a comprehensive array of tools, such as UV lithography, electron beam lithography, Heidelberg laser direct writing, nanoimprint lithography, evaporator, sputterer, PECVD, MOCVD, LPCVD, ALD, critical point dryer, reactive ion etcher, Si DRIE, ICP etcher, probe station, reflectometry, profilometry, ellipsometry, white light interferometry, laser micromachining, dicing saw, wire bonder, wet benches for acid and base, and optical microscopes.

Nanoscale Characterization Facility (NCF)

The NCF functions as a central facilities laboratory, specializing in nanoscale characterization and fabrication. The NCF features an aberration-corrected TEM, a cryo-TEM, and a cryo-enabled plasma-focused ion beam (PFIB). Notably, the NCF houses the first JEOL “NEOARM” scanning/transmission electron microscope (STEM) in North America, capable of capturing sub-2Å images. Additionally, it is equipped with a JEOL F200 TEM/STEM featuring a 200 kV field emission source for routine materials analysis, and a FEI Krios transmission electron microscope designed specifically for dedicated cryo-electron microscopy imaging. The NCF also boasts a Tescan S8000X Plasma Focused Ion Beam-Scanning Electron Microscope, a FEI Quanta field emission environmental SEM with multiple in-situ capabilities, and a JEOL 7500F field emission scanning electron microscope.

Scanning & Local Probe Facility (SLPF)

The SLPF is equipped with eight of state-of-the-art scanning probe microscopes. The SLPF features a scanning tunneling microscope, AFM / NSOM with raman spectroscopy, Asylum MFP 3D AFM, Bruker Icon AFM, and an interfacial force microscope.